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Solutions / Equipment Operation

iWave Autopilot

Manufacturing Expertise in Action.

Explore the Use Cases

Explore Innowave Tech implementations in equipment recovery, process self-healing and orchestration. Then see how Builder Agents turn engineering knowledge into workflows for the next task.

See the Work in Practice.

CDSEM Alarm Recovery Hands-Free Prober Operation Die Bonder Self-Healing

01 / Besi Datacon Evo Series

A Known Alarm.
A Qualified Response.

Besi Datacon Evo die bonder with its operator console and enclosed bonding area.
Besi Datacon Evo Series
Equipment AlarmPost Bond Search Failed
  1. Check Control

    Confirm the agent can act.

  2. Apply the Qualified Recovery

    Follow the programmed response.

  3. Verify the Equipment State

    Check the result before proceeding.

Operator control takes priority. Unresolved conditions escalate to the engineer.

When an equipment alarm interrupts the operation, the next action depends on the condition, the available controls and the recovery procedure.

Autopilot checks that control is available, follows the recovery sequence qualified for that alarm and checks the resulting equipment state. An operator retains priority. An unresolved alarm or an unhandled condition follows the escalation path.

Implemented Alarm Scenarios.

  • Adjust Point Not Found
  • Post Bond Search Failed
  • Data Exchange Error
  • Datamatrix Search Failed
  • Error Result Post Bond Inspection

Each response is specific to the equipment condition and qualified recovery procedure.

See How Autopilot Executes at the Edge

02 / Actual Use Case · Die Bonder

Keep the Post-Epoxy Process on Course.

iWave Insight + iWave Autopilot

Post-bond inspection image with an epoxy region identified for review.
Post-Bond Inspection / Epoxy Review

InsightDetermine the correction

AutopilotApply qualified offsets

Continue monitoring the post-epoxy results.

Detect process drift, determine the correction and apply it at the equipment—then keep watching the result.

  1. 01

    Detect the Drift

    Insight identifies drift in the die bonder’s post-epoxy process results.

  2. 02

    Determine the Adjustment

    Insight determines the recommended offsets to epoxy gun pressure and height.

  3. 03

    Apply the Correction

    Autopilot applies the qualified offsets to keep the process within the required conditions and prevent an epoxy error.

  4. 04

    Monitor the Next Result

    Continue monitoring the post-epoxy results to assess the correction and identify further drift.

Explore Insight’s Operating Loop

03 / Ueno SEKI Tape and Reel AVI

Tune the Machine as One System.

Tape-and-reel equipment with carrier reels and handling stations, from the corporate presentation library. Equipment reference, not an identified Ueno installation.
Equipment Reference / Tape-and-Reel Handling
Inspection QualityProcess Health

Coordinated, Bounded Adjustments

  • Nozzle Arm
  • Pick-and-Place
  • Indexing Stage
  • Turret
AdjustCheck Quality + Alarms
Validate the next step against the process limits. Hold or roll back when a limit is reached.

The nozzle arm, pick-and-place, indexing stage and turret influence one another. Deep orchestration coordinates their adjustments around the same quality and throughput objective.

Inspection results and process-health observations guide a bounded tuning workflow. Following maintenance, that workflow helps retune the machine toward its highest sustainable units per hour, while keeping quality and equipment conditions in view.

  1. 01

    Observe the Process

    Bring together inspection quality, equipment alarms and the state of the machine’s functions.

  2. 02

    Adjust within Defined Limits

    Coordinate the relevant functions and make one bounded tuning step.

  3. 03

    Check before Going Further

    Evaluate the resulting quality and alarm behavior before the next step. Hold or roll back when a limit is reached.

The operating objective is sustainable throughput within the qualified process limits.

04 / Process Tools, Metrology and OCAP

From Tool Health to Lot Disposition.

A wafer on a transfer arm between process chambers.
Wafer Handling and Process Equipment

Lower Tool Health

Higher Sampling Priority

Higher Tool Health

Lower Sampling Priority
MetrologyOCAPDisposition

Engineer Decisions

Confirm the ActionSign Off

Tool health sets sampling priority. Engineers retain the disposition decision.

Follow the Disposition Steps

Broad orchestration connects equipment health to the lots that need attention, the metrology work to perform and the corrective action that follows.

Focus Measurement Where It Matters.

Health-monitoring agents analyze process tools. Lots from tools with a high health index receive lower metrology sampling priority; lots from tools with a low health index receive higher priority. Lower priority does not mean automatic metrology bypass.

Automate the Metrology Work.

Innowave Tech has implemented the following scenarios across these equipment families. The list represents our implementation portfolio, rather than a single five-tool production line.

Hitachi CDSEM
Alarm recovery and corrective action covering alignment, addressing, measurement and confirmation. Recipe reteaching.
KLA Overlay
Alarm recovery and recipe reteaching.
Onto AMT
Alarm recovery and recipe reteaching.
AMAT AMP
Alarm recovery and recipe reteaching.
KLA Dark Field Inspection
Process start and stop, recipe selection and recipe creation.

Connect the Corrective Actions.

Automated out-of-control action plans (OCAP) can trigger a lot for additional measurement, reteach a recipe after an alarm or anomaly, and coordinate lot disposition.

Automated Progression.
Engineer Authority.

Only disposition confirmation and sign-off require an engineer. The remaining steps are automated.

  1. 01
    Automated

    Hold the Lot

  2. 02
    Automated

    Collect and Review the Data

  3. 03
    Automated

    Perform MRB Analysis

    Material Review Board analysis prepares the evidence for the disposition decision.

  4. 04
    Manual / Engineer

    Confirm the Disposition Action

    Release / Pass · Rework / Strip · Scrap · Split Lot · Engineering Evaluation

  5. 05
    Manual / Engineer

    Sign Off

    The engineer signs off the disposition before the workflow proceeds.

  6. 06
    Automated

    Unhold

    Remove the hold in accordance with the signed-off disposition. Unhold does not mean unconditional release to production.

Explore Health-Informed Lot Sampling

How the Qualified Workflow Runs

  1. Recognize the Condition

    The qualified agent identifies the condition covered by its configured workflow.

  2. Check the Prerequisites

    Confirm that the required context and permitted operating conditions are present.

  3. Carry Out the Response

    Execute the defined response through the qualified equipment interface at the equipment edge.

  4. Verify the Next State

    Check for the expected result. When a condition has no programmed response, take no unapproved equipment action and follow the engineering escalation path.

Illustrative workflow. Interface access, live-data dependencies and exception handling are defined for the intended equipment and task.

AI Scalability / Builder Agents

Adapt the Workflow to the Next Task.

Post-maintenance verification needs different steps, conditions and checks from routine setup. Builder Agents adapt the workflow from the new demonstration and procedure. Simulation and engineer qualification follow before equipment-edge execution.

See How the Workflow Adapts

Your Expertise. New Possibilities.

Put AI to Work in Your Operation.

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