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Operational Intelligence / Metrology Sampling

Measure Where the Process Needs Attention.

Use process-tool health to prioritize lots for metrology. Give lots from tools with poorer health greater sampling priority and deprioritise lots from healthier tools within the sampling policy.

The Operating Sequence
Wafer-handling equipment and wafer carrier in a semiconductor process context.
Process Health / Lot Sampling

The Platforms behind the Work

iWave Insight iWave Autopilot

Sampling Is an Operational Decision.

Metrology capacity needs to serve the lots most in need of measurement while preserving the required process coverage. The condition of the tool that processed a lot adds useful evidence to that decision.

Insight analyzes equipment health and lot context. Autopilot carries the resulting sampling decision into the operational workflow and checks that it has reached the relevant factory system.

The Operating Sequence

From Machine Health to Measurement Priority.

Connect the tool’s condition, the lots it processed and the sampling workflow.

Process Health / Lot Sampling
Wafer-handling equipment and wafer carrier in a semiconductor process context.
Tool-health evidence helps direct measurement attention to the lots that need it.
  1. Assess Process-Tool Health

    Health-monitoring agents analyze the tool’s condition and produce the health information used by the sampling decision.

  2. Associate the Lots

    Connect the health assessment to the lots processed by that tool and the relevant queue or process context.

  3. Prioritize Measurement

    Insight raises sampling priority for lots from tools with poorer health and lowers priority for lots from healthier tools, within the required sampling rules.

  4. Execute and Verify

    Autopilot carries out the sampling workflow and checks the resulting system state. Measurement results and subsequent equipment information support the next decision.

Prioritize without Losing Required Coverage.

Engineers define the sampling policy and review the decision logic. Evaluate a changed strategy against the required measurement coverage and operational data before using it in the live flow.

The Platforms behind the Work

Insight supplies equipment-health analysis, sampling visibility and decision support.

Autopilot executes the operational workflow and checks that the intended change has taken effect.

Bring the Expertise to the Next Task.

Insight Builder Agents use datasets, connected data sources and the stated objective to propose hypotheses, identify data gaps and test the modeling approach. Autopilot Builder Agents adapt the execution workflow to the target factory systems.

Builder Agents provide the current platform capability for adapting models and workflows. Engineers evaluate each new task before deployment.

Your Expertise. New Possibilities.

Put AI to Work in Your Operation.