Metrology / Film-Thickness Measurement
Bring Every Recipe Back into Focus.
Automate the recipe procedures behind AMT thickness measurement—from alignment and measurement-site setup to re-teaching, verification and golden-recipe handling.
The Operating Sequence
The Platforms behind the Work
Reliable Measurement Starts with the Setup.
A measurement recipe contains more than a tool command. The die grid, measurement sites, film-stack properties and alignment references all contribute to where and how the tool measures.
Autopilot automates the machine procedures engineers use to establish and recover that setup. When a recipe needs re-teaching, the workflow follows the applicable procedure and checks the result before returning to measurement.
The Operating Sequence
From Recipe Setup to Remeasurement.
The automation follows the machine procedure. Each stage retains the checks that make the recipe usable.
Establish the Measurement Context
Select the applicable recipe and its die grid, measurement sites and film-stack configuration. Follow the procedure for any required measurement offsets.
Teach the Alignment
Work through low- and high-magnification alignment, locate the reference pattern and follow the tool’s pattern-recognition training procedure.
Verify the Measurement Sites
Confirm the intended sites and run the prescribed trial or remeasurement. Check the equipment prompts and results before accepting the re-taught setup.
Manage the Qualified Recipe
Carry out the applicable save, export or import procedure. Golden-recipe handling keeps the approved setup available for the next measurement task.
Automate the Procedure with Its Checks Intact.
A recipe that cannot meet the required alignment or measurement checks needs engineering attention. The automation follows the qualified procedure and its acceptance criteria; it does not infer an acceptable recipe from completion of the clicks alone.
The Platforms behind the Work
Autopilot carries out the machine recipe procedures, checks the equipment responses and manages exceptions. This application automates the procedure used to optimize the recipe.
Bring the Expertise to the Next Task.
Builder Agents use an engineer’s demonstration and explanation to prepare the workflow for another recipe or metrology tool. Engineers refine the alignment steps, acceptance checks and exception paths, then qualify the adapted sequence.
Builder Agents provide the current platform capability for adapting models and workflows. Engineers evaluate each new task before deployment.
Your Expertise. New Possibilities.