Solutions / Equipment Health
iWave InsightFocus Metrology Where It Matters Most.
Prioritize metrology sampling for lots processed by lower-health tools. De-prioritize lots from higher-health tools, with the evidence behind each recommendation in view.
From Tool Health to Sampling Priority
Measure Where It Matters.
Every lot has a process history. Insight connects that history to tool health, helping direct metrology toward the lots that need closer attention.
Tool traces · Lot-to-tool history · Metrology evidence
Bring the Data Together
Connect tool traces, lot history and measurement evidence. Explain the datasets and the sampling decision you want to improve.
Investigate the Hypotheses
Builder Agents generate and test modeling candidates. Users decide how to address data gaps; unsupported candidates remain untested.
Review the Model Evidence
Inspect the selected candidate, its limitations and intended operating context before use.
Inform Sampling Priority
Lots from lower-health tools receive higher metrology-sampling priority. Lots from higher-health tools receive lower priority.
Illustrative workflow. Sampling priority is a recommendation, not an automatic metrology bypass. Insight does not command equipment.
AI Scalability / Builder Agents
A New Objective. A New Investigation.
Moving from lot-sampling priority to equipment-degradation warning changes the required evidence, hypotheses and evaluation. Builder Agents customize the investigation for that objective; the resulting model receives its own evaluation.
Explore a New Modeling ObjectiveYour Expertise. New Possibilities.