Metrology / KLA Overlay
Find the Target. Recover the Measurement.
Combine target-image analysis with recipe re-teaching to recover covered Overlay measurement alarms. Distinguish a misplaced measurement box from a target that needs engineering attention.
The Operating Sequence
The Platforms behind the Work
A Recipe Problem or a Target Problem?
A measurement can fail because the recipe is looking in the wrong place. It can also fail because the incoming target is faint, broken or otherwise unsuitable. Those conditions call for different responses.
The workflow combines image analysis with the equipment’s correlation information. Autopilot follows the re-teach procedure for covered recipe conditions and returns unresolved target or equipment issues to engineering.
The Operating Sequence
From Target Evidence to Recipe Recovery.
Re-teaching focuses on measurement-box and kernel placement, with a check on whether the target can support the measurement.
Inspect the Target
ZeroDefects analyzes the target image and the placement of the measurement regions. The workflow also checks the equipment’s correlation information.
Identify the Recovery Path
Distinguish a covered placement problem from weak or damaged targets and possible equipment faults. Follow the relevant procedure or hand the condition to engineering.
Re-Teach the Recipe
Autopilot adjusts measurement-box and kernel placement through the tool interface according to the qualified re-teach sequence.
Confirm Measurement Quality
Check the resulting target match and measurement response. Continue only when the procedure’s acceptance conditions are met.
Recover What the Evidence Supports.
Moving a measurement box cannot repair an unsuitable target or a hardware fault. The workflow keeps those conditions separate and preserves the engineering handover.
The Platforms behind the Work
ZeroDefects provides the target-image analysis.
Autopilot performs the recipe re-teach, verifies the equipment response and handles exceptions.
Bring the Expertise to the Next Task.
Builder Agents help adapt the image analysis and demonstrated re-teach procedure for another target or recipe family. Engineers evaluate the target criteria, placement rules and failure conditions in the new context.
Builder Agents provide the current platform capability for adapting models and workflows. Engineers evaluate each new task before deployment.
Your Expertise. New Possibilities.